Micro/Nano Technology Center (MNTC) at the University of Louisville is comprised of a $30M 10,000 ft2 class 100/1000 cleanroom and the $3M Huson Imaging & Characterization Laboratory for the microfabrication and characterization of novel materials and devices. University of Louisville faculty, academic institutions and external businesses utilize the facility for research while the MNTC also provides micro and nanofabrication services well beyond its borders.
Last Summer the MNTC purchased and installed a new ThermoFisher Apreo Scanning Electron Microscope (SEM) which has been a welcomed addition for our imaging and characterization capabilities. This system allows us to see very small features at the nanometer scale.
Additionally, the MNTC has ordered a new Oxford Instruments PlasmaPro 100 Estrelas Deep Reactive Ion Etching (DRIE) system to replace our current 20-year old DRIE system. This system allows researchers to vertically etch features into silicon wafers. Installation for this system is slated for the spring of 2022.
Facilities & Capabilities: